Fundraising September 15, 2024 – October 1, 2024 About fundraising
7

Nanoporous hard etch masks using silicon-containing block copolymer thin films

Year:
2011
Language:
english
File:
PDF, 1.39 MB
english, 2011
9

Acid diffusion control in chemically amplified resists

Year:
1999
Language:
english
File:
PDF, 441 KB
english, 1999
29

Photobleaching Photoacid Generator.

Year:
2001
Language:
english
File:
PDF, 234 KB
english, 2001
47

Room Temperature Processable Silicon-Containing Molecular Resist

Year:
2008
Language:
english
File:
PDF, 390 KB
english, 2008